SemiExpo 2022 » А07 Planar/KBTEM
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Main area of Planar/KBTEM is scientific and technical development and production of special opto-mechanical process equipment, inspection and measurement equipment as well as pre-assembly die equipment used in microelectronics products manufacturing:
• multi-beam laser pattern generators;
• automatic wafer steppers;
• laser-based mask repair systems;
• automatic mask inspection systems with high detection threshold;
• inspection and metrology equipment;
• wafer probing, mechanical grinding, dicing and die cassetting equipment;
• OEM optical and mechanical manufacturing
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