SemiExpo 2022 » B02 SVCS Process Innovation
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SVCS develop and manufacture batch horizontal and vertical diffusion furnaces as well as PECVD and LPCVD furnaces for the semiconductor and photovoltaic industry and also for R&D institutes. Other products include various Ultra Hight Purity gas source systems like gas cabinets and VMBs. Last year SVCS developed automation for both wafer transfer from cassettes to boats and for lifting the boats on a paddle of a horizontal furnace, as well as completely new robotic system for our vertical furnace. A great success was facelift of our “table-top” model of R&D small batch horizontal furnace.
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